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    • Program

    Parallel Session

    8:30 Registration
    9:00 Opening & Welcome Address
    9:15 Invited talk-
    Emerging Trends in Semiconductor Industry: Artificial Intelligence (AI) and Predictive Analytics
    Dr. John Wang
    MathWorks, Inc., USA
    9:50 Invited talk-
    Avoiding drowning in your Data Lake …
    Dr. John Kibarian
    PDF Solutions
    10:25 Break
    10:50 Invited talk-
    How to Use Streaming Analytics to Create a Real-Time Digital Twin
    Mr. Brad Klenz
    SAS Institute
    11:25

    Invited talk-
    Beyond Traditional APC
    Dr. James Moyne
    Applied Materials Inc.
    12:00 Lunch

    EMBA Intelligence

    13:30 Invited talk-
    Automated Data Analysis and Performance Tuning in DUV Light Source
    Dr. Rahul Ahlawat
    CYMER, LLC
    14:10 Invited talk-
    Applying Smart Manufacturing and Machine Learning Methods Across Global Semiconductor Ecosystems
    Dr. Paul Simon
    Qualtera
    14:50 AI and Big Data Analytics for Wafer Fab Energy Saving and Chiller Optimization to Empower Intelligent Manufacturing
    Chen-Fu Chien1,2, Ying-Jen Chen3, Ya-Tung Han1, Meng-Ke Hsieh3, Chi-Ming Lee1, Taylor Shih4, Mao-Yung Wu4, Wen-Wei Yang4
    1 National Tsing Hua University, Taiwan, 2 Artificial Intelligence for Intelligent Manufacturing Systems (AIMS) Research Center, MOST, Taiwan, 3 DALab Solutions x Associates Co., Ltd., Taiwan, 4 Macronix International Co., Ltd., Taiwan
    15:10 AI Applications for Green Manufacturing
    Stock Chang, Keung Hui, KH Tsai, CC Chuang, Leo Ke, Evan Wu, SY Sheen
    Taiwan Semiconductor Manufacturing Company, Ltd.
    15:30 Break
    16:00 Machine Learning and Big Data in optical CD metrology for process control
    Barak Bringoltz, Eitan Rothstein, Ilya Rubinovich, YongHa Kim, Noam Tal, Oded Cohen, Shay Yogev, Ariel Broitman, Eylon Rabinovich, and Tal Zaharoni
    Nova measuring instruments
    16:20 Recurrent Reinforcement Learning for Predictive Overall Equipment Effectiveness
    Da-Yin Liao1, Wen-Pao Tsai2, Hsuan-Tseng Chen2, Yao-Po Ting2, Chieh-Yu Chen1, Hsing-Chi Chen1, Shi-Chung Chang1
    1 National Taiwan University, 2 Taiwan Semiconductor Manufacturing Co.
    16:40 Apply RPA (Robotic Process Automation) in Semiconductor Smart Manufacturing
    Ssu Chieh Lin, Lian Hua Shih, Damon Yang, James Lin, Ji Fu Kung
    United Microelectronics Corporation
    17:00 Adjourn

    Engineering/Manufacturing Excellence

    13:30 Process Window Optimization by Die to Database e Beam Inspection
    Tuung Luoh, Ling-Wuu Yang, Tahone Yang, Kuang-Chao Chen
    Macronix International Co. Ltd.
    13:50 Resolving Wrong Die Picked Thru Development Of Sequentialbased Application for Die Sorter Equipment
    Wiljelm Carl K. Olalia, Samuel T. Suaverdez, Mark Anthony O. Velasco
    ON Semiconductor Philippines Inc.
    14:10 The Value and Effectiveness of Sensor Trace Analytics in Solving Yield Impact Issues: A Case Study
    Kim Kok Gan, Hein Mun Lam, Michael Zhao, Joe Lee, Tom Ho
    BISTel
    14:30 Smart GDBC Screening for High Quality IPD
    Hao Chen, Hung-Chih Lin, and Min-Jer Wang
    Taiwan Semiconductor Manufacturing Company, Ltd
    14:50 Shop Floor Optimization through Job Scheduling and Machine Automation
    Yuwen Zhang
    Singapore University of Technology and Design
    15:10 IDENTIFICATION AND CONTROLLING SOURCES OF DIE CHIPPINGS ON WAFER LEVEL CHIP SCALE PACKAGE (WLCSP) PROCESS
    Glenn T. Placido
    ON Semiconductor Philippines Inc.
    15:30 Break
    16:00 Smart Manufacturing Stakeholders and Their Requirements
    Alan Weber
    Cimetrix Incorporated
    16:20 Queue Time Reduction in Wafer Fab Process through Lean Six Sigma Approach
    Eric KERK & Chih Ming CHAN
    GLOBALFOUNDRIES
    16:40 On the Decomposition of Bias Terms in Mixed Multi-Product Multi-Tool APC Operations
    Keung Hui, Leo Ke, SY Sheen
    Taiwan Semiconductor Manufacturing Company, Ltd.
    17:00 Adjourn

    Interactive Session

    P1 A Microlens Reactive Ion Etching Process Study on CMOS Image Sensor
    Wen-Hao Lo, Pin-Chieh Huang, Cheng-Han Ting, Kuo-Fang Huang, Tz-Shiuan Tzeng, Tz-Shiuan Lin, Shih-Ping Lee
    Powerchip Technology Corporation
    P2 Electrical and Reliability Characteristics of LPRTO and ISSG Oxide as Tunnel dielectric in SONOS Applications
    Yi-Ping Lin, Chia-Hsin Liu, Tsung-Hui Chou, Chia-Hsin Tsai
    Powerchip Technology Corporation
    P3 Method and application of metrology tool alignment for semiconductor cross FABs
    Tang-Chi Wang, Ya-Chuan Chan
    Powerchip Technology Corporation
    P4 Multi-Products, Process and Machine Control Chart Application in Semiconductors
    Wu Cheng June, Wei Jui Chen
    Powerchip Technology Corporation
    P5 A practical Quality control System for raw material through COA data analytics on Semiconductor Manufacturing
    Ricky Leu, Demeter Chen
    Powerchip Technology Corporation