2013 IMEC 掃描擴展式電阻顯微術(SSRM)技術與應用論壇(Scanning spreading resistance microscopy; principles, applications for advanced technologies and commercial offering by Imec CAMS)
2013-03-28
imec 在掃描擴散電阻顯微術(Scanning Spreading Resistance Microscopy) 的領域已深耕多年,並同時提供業界先進的高解析度(~1nm) 二維空間定量分析離子分佈之量測服務,以因應相關研發人員在半導體進入到32/28 奈米或更先進世代後元件特性分析的需求。在本次論壇中,來自 imec 比利時總部與天主教鲁汶大學的學者專家 Prof. Wilfried Vandervorst 教授與 Dr. Kristof Paredis 博士將與台灣業界分享 imec 在 SSRM 領域上多年實務經驗與最新技術發展狀況,並會在論壇中介紹目前 imec 先進量測中心(CAMS)對外開放服務的內容,歡迎從事半導體製程相關之研發或分析人員蒞臨參加,會後亦可另外安排討論時間與講師進行進一步交流,因場地人數限制,敬請提早報名,以免向隅。
In this workshop, imec will present scanning spreading resistance microscopy (SSRM), a technique invented at imec for the visualization and quantification of carrier distributions in semiconductor devices with nm-resolution. In a first presentation, Prof. dr. ir. Wilfried Vandervorst will extensively describe the general framework and the theoretical principles of SSRM. Furthermore, he will show various applications of SSRM at imec highlighting the importance of this technique for materials research and device engineering ranging from planar devices, TFET, FINFETs to CNT’s in via’s. In the second presentation, dr. Kristof Paredis will introduce the imec Center for Advanced Metrology Solutions (imec CAMS) which offers SSRM service measurements, training, and supplies. He will mainly focus on the practical aspects of SSRM and the related service, thereby indicating how CAMS can advance your research. During their visit, the speakers will also be available for (private) discussions.

[時間] April 23, 2013
[地點] 台灣愛美科 新竹市科學工業園區篤行路6-2 號4F
[線上報名網址] www.imec.tw
[聯絡窗口] Vikey Liao (03) 578-1115 ext.915 E-mail : Vikey.Liao@imec-tw.tw
Program(研討會流程):
13:00 - 13:30 Registration and coffee reception

13:30 - 13:45 Welcome Remark WenYen Lin, Sales Director, imec Taiwan

13:45 - 15:00 Session I: Carrier profiling in advanced technologies with SSRM; basic principles and performance.
Dr. Wilfried Vandervorst, Imec Fellow Department Head Materials and Components Analysis, Professor KU Leuven

15:00 - 15:15 Coffee break

15:15 - 16:00 Session II: The Imec Center for Advanced Metrology Solutions; introduction of the SSRM services and the practical aspects of SSRM.
Dr. Kristof Paredis, Manager of Center for Advanced Metrology Solutions Researcher of Materials & Components Analysis

16:00 - 16:30 Demonstration and network discussion