:: TSIA - 台灣半導體產業協會活動快訊 ::

This is the fourth AEC/APC symposium staged on an Asian platform, for both international professionals and regional practitioners alike, to present their latest developments and to exchange their experience in AEC/APC.

The Symposium will review recent technological advancements in order to assure alignment with the needs of integrated circuit manufacturers, semiconductor equipment suppliers, software suppliers, sensors and metrology suppliers. Major AEC/APC issues and experiences will be discussed in this two-day event, which includes a technical tutorial and supplier exhibits.

The AEC/APC-Asia Symposia 2006 is jointly organized by the Taiwan Semiconductor Industry Association (TSIA), SEMI, and the International SEMATECH Manufacturing Initiative (ISMI).

Call for Papers

This Call for Papers is directed towards the semiconductor community. Other industries employing AEC/APC may also submit abstracts. The symposium will be built around sessions such as (but not limited to) the following topics:

· Applications in high-volume manufacturing

· Factory-wide applications and deployment

· Sensor development and implementation

· Sensor/actuator bus and intelligent sensors

· Sensor integration into existing process tools

· Integrated metrology

· Real-time data collection and management

· Process modeling and model-based control

· Control architecture requirements

· Migration to mainstream computing standards

· Merging of real-time & defect/yield databases
· Applications (Etch, Litho, CVD, PVD, etc.)

· Fault Detection and Classification (FDC)

· User algorithms and their integration

· Future APC/FDC needs and requirements

· Run-to-run, wafer-to-wafer, real-time control

· Benefits and justification (ROI, CoO, OEE)

· Standards (Communication, Sensor Bus, Data Quality, Integrated Metrology, DDA, others)

· Piggyback and SCADA controllers

· Tool productivity data collection/analysis

· e-Diagnostics, e-Manufacturing, and EEC

Submitting Abstracts

Please send an extended abstract in Word format to aecapc@tsia.org.tw by July 21, 2006.

The submission has to include the title, author’s name(s) and affiliation, presenter’s name and e-mail contact and an extended abstract (up to two pages, one page of text, optionally one page of graphical illustrations) clearly describing the purpose, the chosen approach, and the achieved results of your work.

You should select the topic(s) your contribution best fits in from the list above. There will be oral presentations and a poster session. You may indicate if you prefer oral or poster presentation, but the program committee and abstract review committee will select presentations for the oral and poster sessions. The presenters will be notified by August 21, 2006. Final presentations must be submitted electronically in Microsoft PowerPoint file format by October 21, 2006.

Important Dates

Abstract Submission Deadline
July 21, 2006

Abstract Acceptance Confirmation
August 21, 2006

Presentation Materials Due-date
October 21, 2006

http://www.tsia.org.tw/seminar/aecapc/2006/index.shtml.htm